Faculty Achievement: Dr. Thomas Wilson

Dr. Thomas Wilson, professor of physics, has had a manuscript accepted for publication in the Journal of Micro/Nanolithography, MEMS and MOEMS (JM3), (www.spie.org/x865.xml) titled “Bilayer lift-off process for aluminum metallization.” Coauthors are Konstantin Korolev, Research Associate, Department of Physics; and Nathaniel Crowe, Joan C. Edwards School of Medicine. The paper describes a safe, robust and novel method for the patterning of thin (100-nm or less) sputtered aluminum films with micron feature sizes on semiconductor substrates.